How MEMS Measurement Ensures Reliability in Micro Devices

 


Introduction

Micro-Electro-Mechanical Systems (MEMS) are essential to modern devices—ranging from automotive sensors to implantable medical tools. Their performance relies heavily on precise geometry and functional integrity. This is where MEMS measurement becomes critical. With components smaller than a grain of sand, even nanometer-level deviations can result in device failure. Accurate metrology helps maintain function, consistency, and durability of these intricate structures.

Why MEMS Measurement Matters

MEMS devices often involve moving parts—cantilevers, diaphragms, or suspended beams—integrated into silicon substrates. Unlike larger mechanical systems, MEMS cannot be verified using tactile contact tools due to their delicate nature. MEMS measurement ensures all dimensions, from layer thickness to structural alignment, meet ultra-tight tolerances critical for device function and integration.

For instance, in a MEMS pressure sensor, if the diaphragm thickness deviates beyond ±0.1 µm, the sensitivity will drift, making it unreliable in life-critical environments like pacemakers or aircraft cabin sensors.

Key Techniques in MEMS Measurement

  1. Optical Interferometry – Enables high-resolution height profiling of MEMS surfaces. It's ideal for measuring step heights and surface curvature with sub-nanometer resolution.

  2. White Light Scanning – Useful for transparent or reflective surfaces, providing true topography across layers.

  3. Confocal Microscopy – Used for depth measurements, this technique creates sharp 3D profiles by filtering out-of-focus light.

  4. Laser Doppler Vibrometry – Measures dynamic motion and resonance frequencies of moving MEMS parts, validating performance under real operating conditions.

  5. Critical Dimension SEM – Verifies line widths, gaps, and sidewall angles, especially for MEMS fabricated using lithographic processes.

Each method plays a role in verifying both static and functional characteristics of the device, ensuring production consistency and product safety.

How MEMS Measurement Supports Reliability

Reliable MEMS operation requires three things: dimensional precision, mechanical response, and thermal stability. Measurement systems validate each of these. For example, in accelerometers used in smartphones, precise alignment of the seismic mass and suspension beams is essential for accurate motion detection. MEMS measurement ensures these parts remain within micro-scale tolerances during volume production.

Additionally, measurement is critical in quality assurance. Failures such as stiction (adhesion of tiny parts) can be detected early using surface metrology. This allows for design adjustments or process improvements before products reach the customer.

Viewmm – Advanced Metrology Systems for MEMS

Whether your work includes wafer and MEMS fabrication, chip test, assembly and packaging (IDM, OSAT, and fan-out wafer-level packaging), photomasks, wire-bonding, PCBs, hard disc drives, mobile devices, drug delivery systems (implantable, transdermal, intradermal), or other types of 2D, non-contact applications, VIEW Micro Metrology systems are made to measure components with ultra-tight tolerances quickly, accurately, and in line with manufacturing processes.

Conclusion

MEMS measurement is not just about inspection—it's about enabling reliability. From medical implants to aerospace sensors, these tiny systems power critical functions in our lives. Ensuring their performance begins with precision metrology.

Get in touch with VIEW Micro Metrology to make your MEMS processes more precise and reliable.

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