How MEMS Measurement Ensures Reliability in Micro Devices

Introduction Micro-Electro-Mechanical Systems (MEMS) are essential to modern devices—ranging from automotive sensors to implantable medical tools. Their performance relies heavily on precise geometry and functional integrity. This is where MEMS measurement becomes critical. With components smaller than a grain of sand, even nanometer-level deviations can result in device failure. Accurate metrology helps maintain function, consistency, and durability of these intricate structures. Why MEMS Measurement Matters MEMS devices often involve moving parts—cantilevers, diaphragms, or suspended beams—integrated into silicon substrates. Unlike larger mechanical systems, MEMS cannot be verified using tactile contact tools due to their delicate nature. MEMS measurement ensures all dimensions, from layer thickness to structural alignment, meet ultra-tight tolerances critical for device function and integration. For instance, in a MEMS pressure sensor, if the diaphragm thickness deviates beyo...